It is evident that Selleckchem VX-680 the coated PS nanospheres are hexagonal close-packed ordering. Figure 2b also shows the cross-sectional TEM image for the SiGe/Si MQWs. No defects such as threading dislocations were observed within the SiGe/Si MQWs even if extending the observation area, indicating the high-quality SiGe epitaxy by UHV/CVD. In the following RIE process, the etching rate of Si or SiGe with a mixture of SF6 and O2 is much higher than that of PS nanospheres. Therefore, the nanosphere template acts as an etching mask, and a variety of SiGe/Si MQW nanostructures can be produced using RIE. At the beginning of the etching process shown in Figure 3a, the nanopits were formed at the vertex of a hexagon on the surface,
TSA HDAC molecular weight indicating that the PS nanospheres indeed acted as an etching mask and the unprotected surface (i.e., the interstices of nanospheres) was preferentially etched by the reactive F ions during the RIE process. With increasing etching times to 200 and 300 s (Figure 3b, c), the pattern of the nanosphere template was successfully transferred to the underlying substrate to form the close-packed nanorod arrays. The preservation of the hexagonal ordering and the interdistance of the original nanospheres are apparent for the resulting nanorod arrays. With further
increase in etching time to 500 s, these nanorod arrays finally transformed into the pyramid-like nanostructures (nanopyramids) with the reduced heights (see Figure 3d).
Figure 2 SEM and TEM images of the starting SiGe/Si MQW sample. (a) SEM image showing an 800-nm-diameter PS nanosphere monolayer coated on the SiGe/Si MQW sample. (b) Cross-sectional TEM image showing the 50-period SiGe/Si MQWs epitaxially grown on Si. ADP ribosylation factor Figure 3 SEM images of the SiGe/Si MQW samples etched by RIE for different durations. (a) 100 s, (b) 200 s, (c) 300 s and (d) 500 s, respectively. Figure 4a shows the corresponding PL spectra measured at 10 K. The narrow peak located at 1.62 μm (namely, the P line) with its satellites at longer wavelengths arises from the C-O complexes in Si as reported for many different SiGe structures [26, 27]. The strong peak around 1.1 μm is assigned to the transverse optical (TO) phonon-assisted recombination in bulk Si. Therefore, the peaks between the Si TO peak and P line, which are amplified as shown in Figure 4b, can be attributed to the PL emissions from the SiGe/Si MQWs. First, we Selleck Emricasan observe that the as-grown SiGe/Si MQW sample exhibits a very broad PL emission in the range from 1.3 to 1.55 μm, similar to the near-bandgap transition in Ge/Si MQDs . This broad peak could be further deconvoluted into two main Gaussian line-shaped peaks at 1.45 and 1.52 μm, respectively. The higher-energy peak can be assigned to the no-phonon (NP) transition resulting from recombination of the bound exciton without phonon participation, and the lower-energy peak is the TO replica of Si1 − x Ge x alloys [28, 29].